JPH0217518B2 - - Google Patents

Info

Publication number
JPH0217518B2
JPH0217518B2 JP59240261A JP24026184A JPH0217518B2 JP H0217518 B2 JPH0217518 B2 JP H0217518B2 JP 59240261 A JP59240261 A JP 59240261A JP 24026184 A JP24026184 A JP 24026184A JP H0217518 B2 JPH0217518 B2 JP H0217518B2
Authority
JP
Japan
Prior art keywords
cooling water
outlet
rotating shaft
seal plate
water inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59240261A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61117192A (ja
Inventor
Mikio Tanabe
Shuichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP24026184A priority Critical patent/JPS61117192A/ja
Publication of JPS61117192A publication Critical patent/JPS61117192A/ja
Publication of JPH0217518B2 publication Critical patent/JPH0217518B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Details Of Valves (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP24026184A 1984-11-13 1984-11-13 アイソレ−シヨンバルブ Granted JPS61117192A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24026184A JPS61117192A (ja) 1984-11-13 1984-11-13 アイソレ−シヨンバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24026184A JPS61117192A (ja) 1984-11-13 1984-11-13 アイソレ−シヨンバルブ

Publications (2)

Publication Number Publication Date
JPS61117192A JPS61117192A (ja) 1986-06-04
JPH0217518B2 true JPH0217518B2 (en]) 1990-04-20

Family

ID=17056862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24026184A Granted JPS61117192A (ja) 1984-11-13 1984-11-13 アイソレ−シヨンバルブ

Country Status (1)

Country Link
JP (1) JPS61117192A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102330145A (zh) * 2011-09-28 2012-01-25 上海汉虹精密机械有限公司 单晶炉隔离系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2628370B2 (ja) * 1989-03-24 1997-07-09 信越半導体 株式会社 単結晶引上装置
JP4488654B2 (ja) * 2001-06-18 2010-06-23 コマツ工機株式会社 半導体単結晶引上装置のゲートバルブ
US8266912B2 (en) 2008-09-16 2012-09-18 General Electric Company Reusable weld joint for syngas fuel nozzles
KR101060479B1 (ko) 2009-11-25 2011-08-30 (주)에스테크 잉곳성장장치의 게이트밸브 냉각장치
KR101136066B1 (ko) * 2009-11-27 2012-04-18 (주)에스테크 잉곳성장장치의 게이트밸브 냉각수 공급장치
JP2012101965A (ja) * 2010-11-09 2012-05-31 Matels Inc 熱遮蔽機

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115140U (en]) * 1974-07-22 1976-02-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102330145A (zh) * 2011-09-28 2012-01-25 上海汉虹精密机械有限公司 单晶炉隔离系统

Also Published As

Publication number Publication date
JPS61117192A (ja) 1986-06-04

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